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Imports and parses recipe and log files generated by Angstrom Engineering thermal evaporation systems. These files contain time-series measurements and process metadata, including chamber pressure, source activity, deposition rate, film thickness, tooling parameters, substrate conditions, and related deposition variables. The package provides functions to extract, organize, and summarize process information in a compact format suitable for data analysis, visualization, and quality control workflows.
Package details |
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| Author | Thomas Gredig [aut, cre, cph] (ORCID: <https://orcid.org/0000-0002-5824-7626>) |
| Maintainer | Thomas Gredig <tgredig@csulb.edu> |
| License | GPL (>= 3) |
| Version | 0.2.3 |
| URL | https://github.com/thomasgredig/angstromATE |
| Package repository | View on CRAN |
| Installation |
Install the latest version of this package by entering the following in R:
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