ATE.readRecipe: Read an ATE .rcp recipe file

In angstromATE: Imports Recipe and Log Files from Angstrom Engineering Thermal Evaporator

Read an ATE .rcp recipe file

Description

Reads an XML-based ATE '.rcp' recipe file and extracts deposition-relevant parameters into a data frame. The returned table contains one row per '"Deposit Rate"' action in the recipe, preserving recipe order.

Usage

ATE.readRecipe(filename)

Arguments

filename

Character string. Path to the '.rcp' XML recipe file.

Details

For each deposition action, the function reports the source name, the first chamber pressure set point encountered before or within the recipe, the most recent substrate temperature ramp set point before deposition, the target deposition rate, timeout, and target thickness.

XML namespaces are ignored when matching element names.

Source names are resolved by matching each deposition action's 'RecipeSourceID' to the corresponding 'RecipeSource' entry.

The substrate temperature is inferred from the last preceding '"Ramp Temperature"' action. The function tries the following XML field names, in order, and returns the first numeric value found: 'TemperatureSetpoint', 'TargetTemperature', 'Temperature', and 'Setpoint'.

Value

A 'data.frame' with columns:

source_name

Name of the recipe source used for the deposition action.

pre_vacuum_pressure

First chamber pressure set point from a '"Wait for Chamber Pressure"' action.

last_substrate_temperature

Most recent substrate temperature ramp target or set point before the deposition action.

deposition_rate

Target deposition rate from the '"Deposit Rate"' action.

deposition_time

Timeout value from the '"Deposit Rate"' action.

thickness

Target thickness from the '"Deposit Rate"' action.

If no deposition actions are found, a one-row data frame is returned with 'NA' values for deposition-specific fields.

Examples

## Not run: 
recipe <- ATE.readRecipe("my_recipe.rcp")
recipe

## End(Not run)

angstromATE documentation built on Sept. 25, 2026, 1:07 a.m.