wafer: resitivity of wafer in semiconductor experiment

waferR Documentation

resitivity of wafer in semiconductor experiment

Description

A full factorial experiment with four two-level predictors.

Format

A data frame with 16 observations on the following 5 variables.

x1

a factor with levels - +

x2

a factor with levels - +

x3

a factor with levels - +

x4

a factor with levels - +

resist

Resistivity of the wafer

Source

Myers, R. and Montgomery D. (1997) A tutorial on generalized linear models, Journal of Quality Technology, 29, 274-291.


faraway documentation built on Aug. 23, 2022, 5:08 p.m.

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