Dep_Polar: Dep_Polar

In gpilgrim2670/SputterCalc: Calculates sputter deposition rates for a system of given geometry

Description

Calculates amount of material deposited for a rotating system of given geometry and deposition rate

Usage

Dep_Polar(
  Rate,
  Epsilon = 1,
  Disc_1 = 0,
  Disc_2 = 0,
  Rad_1 = 1.4375,
  Rad_2 = 3,
  Ins_1 = 2.375,
  Fing_1 = 4.8125,
  Knuc_1 = 0.87266,
  Rot_1 = 0.17453,
  Interval = 0.2
)

Arguments

Rate	sputter power - a constant
Epsilon	a sputter rate scaling factor, usually 1
Disc_1	relative angle (in degrees) of larger disc (disc 1) in chamber door vs. gravity
Disc_2	relative angle (in degrees) of smaller disc (disc 2) in chamber door vs. gravity
Rad_1	fixed value describing the distance between the center of larger disc (disc 1) and the center of the smaller disc (disc 2)
Rad_2	fixed value describing the distance between the center of disc 2 and the position of each cathode (cathodes are symetric)
Ins_1	distance the gun has been inserted into chamber, measured from inside of disc 2 to the center of the gun knuckle
Fing_1	distance from the knuckle to the gun tip
Knuc_1	angle (in radians) at which the gun is set at the knuckle. Min is 0, max is 1.18
Rot_1	angle (in radians) at which the gun is rotated, min is 0, max is 2*pi
Interval	the size of each step in a numeric solution. Larger intervals will produce courser solutions, but will be faster. Smaller intervals will produce more detailed solutions but will be more computationally expensive

Author(s)

Greg Pilgrim [e-mail]

gpilgrim2670/SputterCalc documentation built on June 24, 2020, 12:27 a.m.