HLen: HLen

In gpilgrim2670/SputterCalc: Calculates sputter deposition rates for a system of given geometry

Description

distance between the chamber origin and the platen (height of platen relative to gun)

Usage

HLen(
  Disc_1 = -5,
  Disc_2 = -33,
  Rad_1 = 1.4375,
  Rad_2 = 3,
  Fing_1 = 4.8125,
  Knuc_1 = 0.610865,
  Rot_1 = 0.785398
)

Arguments

Disc_1	relative angle (in degrees) of larger disc (disc 1) in chamber door vs. gravity
Disc_2	relative angle (in degrees) of smaller disc (disc 2) in chamber door vs. gravity
Rad_1	fixed value describing the distance between the center of larger disc (disc 1) and the center of the smaller disc (disc 2)
Rad_2	fixed value describing the distance between the center of disc 2 and the position of each cathode (cathodes are symmetric)
Fing_1	distance from the knuckle to the gun tip
Knuc_1	angle (in radians) at which the gun is set at the knuckle. Min is 0, max is 1.18
Rot_1	angle (in radians) at which the gun is rotated, min is 0, max is 2*pi

Author(s)

Greg Pilgrim [e-mail]

gpilgrim2670/SputterCalc documentation built on June 24, 2020, 12:27 a.m.