cirfab: cirfab

Description Usage Format Source

Description

2^4 full factorial design and response from an experiment fabricating integrated circuit boards. Each factor has coded levels -1,+1

Usage

1

Format

A data frame with 16 rows and 5 variables:

x1

rotation method

x2

nozzle position

x3

deposition temperature

x4

deposition time

ybar

thickness of the epitaxial layer (micrometres) - average from six wafers

Source

Wu, C.F.J. and Hamada, M.S. (2009). Experiments: Planning, Analysis, and Optimization. 2nd ed. Wiley, New York. Page 155


statsdavew/apts.doe documentation built on Sept. 4, 2019, 10:03 p.m.