Wafer: Wafer data set

In moviedo5/fda.tsc: Functional Data Sets for Time Series Classification

Description

Wafer data relates to semi-conductor microelectronics fabrication. A collection of inline process control measurements recorded from various sensors during the processing of silicon wafers for semiconductor fabrication constitute the wafer database; each data set in the wafer database contains the measurements recorded by one sensor during the processing of one wafer by one tool.

Usage

data(Wafer)

Format

The variables are as follows:

• df: data.frame with the following variables:

  • class: Corresponding class level of “Wafer” curves with 2 classes.

  • sample:Factor variable. In TSC database, the first 1000 values (sample=train) are used for training sample and the rest of 6164 (sample=test) for testing.

• x: fdata class object with with n=7164 curves (per row) in 152 discretization points (per column).

Details

The two classes are normal and abnormal. There is a large class imbalance between normal and abnormal (10.7

Source

http://timeseriesclassification.com/description.php?Dataset=Wafer

References

This dataset was formatted by R. Olszewski as part of his thesis: Olszewski, R. T. (2001). Generalized feature extraction for structural pattern recognition in time-series data (No. CMU-CS-01-108). CARNEGIE-MELLON UNIV PITTSBURGH PA SCHOOL OF COMPUTER SCIENCE.

moviedo5/fda.tsc documentation built on May 16, 2019, 12:10 a.m.