Data on different types of silicon wafers

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Description

The WaferTypes data frame has 144 rows and 8 columns.

Format

This data frame contains the following columns:

Group

a factor with levels 1 to 4

Temperature

an ordered factor with levels 900 < 1000 < 1100

Type

a factor with levels A and B

Wafer

a numeric vector

Site

a numeric vector

delta

a numeric vector

Thick

a numeric vector

uWafer

an ordered factor giving a unique code to each group, temperature, type and wafer combination.

Source

Littel, R. C., Milliken, G. A., Stroup, W. W., and Wolfinger, R. D. (1996), SAS System for Mixed Models, SAS Institute (Data Set 5.8).

Examples

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