Man pages for DRManager/waferscopeR
Grammar for wafer level uniformity analysis
| compare_wafer | Compare wafer maps |
| explore_klaraw | Explore wafer profile in each slot in input files and output... |
| explore_lot_klaraw | Explore pre and post measurement of each slot in input files |
| map_decompose | Decompose wafer maps |
| map_wafer | Plot wafer contour maps |
| read_kla_f5 | Read from raw data file from KLA-Tencor metrology tools |
| wafer_stat | Wafer statistics: mean, 3s and range non-uniformity (NU) |
