map_wafer: Plot wafer contour maps

In DRManager/waferscopeR: Grammar for wafer level uniformity analysis

Description

Given thickness profile of a wafer, this function plots wafer maps including radial and residual decomposition

Usage

map_wafer(wafer, resolution = "normal", point = "off", maps = "mean",
  wlabel = "Wafer Map")

Arguments

wafer	dataframe from the wafer list (output of read.kla_f5, or a self-imported file obeys the same data structure)
resolution	takes value of 'high', 'normal', 'low', 'rapid'
point	'on (off)': display (hide) point label,
maps	'mean' shows the mean map only, 'decompose' all the radial and residual maps, 'all' includes all above three maps and radial spatial distribution
wlabel	label of the output plot

Value

coresponding wafer map(s)

DRManager/waferscopeR documentation built on May 6, 2019, 1:18 p.m.