wafer_stat: Wafer statistics: mean, 3s and range non-uniformity (NU)
In DRManager/waferscopeR: Grammar for wafer level uniformity analysis
Description
Usage
Arguments
Value
Description
Takes a dataframe from wafer list and returns wafer statistics, including mean, 3 sigma and range nonuniformity
Usage
1
wafer_stat(wafer)
Arguments
wafer
dataframe from the wafer list (output of read.kla_f5)
Value
Wafer statistics: mean, 3-sigma and range NU
DRManager/waferscopeR documentation built on May 6, 2019, 1:18 p.m.
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Description Usage Arguments Value
Description
Takes a dataframe from wafer list and returns wafer statistics, including mean, 3 sigma and range nonuniformity
Usage
1 | wafer_stat(wafer)
|
Arguments
wafer |
dataframe from the wafer list (output of read.kla_f5) |
Value
Wafer statistics: mean, 3-sigma and range NU
R Package Documentation
Browse R Packages
We want your feedback!
Note that we can't provide technical support on individual packages. You should contact the package authors for that.
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