read_kla_f5: Read from raw data file from KLA-Tencor metrology tools
In DRManager/waferscopeR: Grammar for wafer level uniformity analysis
Description
Usage
Arguments
Value
Description
Takes raw datafile from KLA metrology machine and returns a wafer data in lists
Usage
1
read_kla_f5(filename)
Arguments
filename
Path of the raw metrology datafile
Value
A list of wafer profiles
DRManager/waferscopeR documentation built on May 6, 2019, 1:18 p.m.
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Description Usage Arguments Value
Description
Takes raw datafile from KLA metrology machine and returns a wafer data in lists
Usage
1 | read_kla_f5(filename)
|
Arguments
filename |
Path of the raw metrology datafile |
Value
A list of wafer profiles
R Package Documentation
Browse R Packages
We want your feedback!
Note that we can't provide technical support on individual packages. You should contact the package authors for that.
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