explore_klaraw: Explore wafer profile in each slot in input files and output...
In DRManager/waferscopeR: Grammar for wafer level uniformity analysis
Description
Usage
Arguments
Value
Description
A quick exploration of wafer profile can be done with KLA raw data files using this function. It outputs a boxplot or a summary of the input file.
Usage
1
explore_klaraw(file, output = "boxplot")
Arguments
file
KLA raw data file of wafer profile measurement
output
specify output type: 'boxplot': show a boxplot, 'summary': show a summary
Value
A boxplot or a summary of the wafer profiles in the input file
DRManager/waferscopeR documentation built on May 6, 2019, 1:18 p.m.
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Description Usage Arguments Value
Description
A quick exploration of wafer profile can be done with KLA raw data files using this function. It outputs a boxplot or a summary of the input file.
Usage
1 | explore_klaraw(file, output = "boxplot")
|
Arguments
file |
KLA raw data file of wafer profile measurement |
output |
specify output type: ' |
Value
A boxplot or a summary of the wafer profiles in the input file
R Package Documentation
Browse R Packages
We want your feedback!
Note that we can't provide technical support on individual packages. You should contact the package authors for that.
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