explore_lot_klaraw: Explore pre and post measurement of each slot in input files
In DRManager/waferscopeR: Grammar for wafer level uniformity analysis
Description
Usage
Arguments
Value
Description
A quick exploration of wafer maps can be done with KLA raw data files using this function. It compares the pre and post measurement of each slot in the file.
Usage
1
explore_lot_klaraw(pre, post)
Arguments
pre
KLA raw data file of pre-process measurement
post
KLA raw data file of post-process measurement
Value
the pre, post and delta thickness and a table with uniformity statistics
DRManager/waferscopeR documentation built on May 6, 2019, 1:18 p.m.
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Description Usage Arguments Value
Description
A quick exploration of wafer maps can be done with KLA raw data files using this function. It compares the pre and post measurement of each slot in the file.
Usage
1 | explore_lot_klaraw(pre, post)
|
Arguments
pre |
KLA raw data file of pre-process measurement |
post |
KLA raw data file of post-process measurement |
Value
the pre, post and delta thickness and a table with uniformity statistics
R Package Documentation
Browse R Packages
We want your feedback!
Note that we can't provide technical support on individual packages. You should contact the package authors for that.
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