Description Usage Arguments Value
A quick exploration of wafer maps can be done with KLA raw data files using this function. It compares the pre and post measurement of each slot in the file.
1 | explore_lot_klaraw(pre, post)
|
pre |
KLA raw data file of pre-process measurement |
post |
KLA raw data file of post-process measurement |
the pre, post and delta thickness and a table with uniformity statistics
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