wafer.1: Wafer 1

In clayford/dvdata: Data Files for Design and Analysis of Experiments (Dean & Voss)

Wafer 1

Description

An experiment to reduce the variability of the thickness of an "epitaxial layer" deposited onto silicon wafers during the manufacture of integrated circuit devices. Wafer 1 is is the orthogonal array presented in Chapter 15, Table 15.25.

Usage

wafer.1

Format

A data frame of 16 rows and 17 variables. (See example 15.6.1 for explanation of variables.)

Source

http://www.wright.edu/~dan.voss/bookdata/data.html

References

Dean, A. and Voss, D. (1999). Design and Analysis of Experiments. New York, Springer.

See Also

wafer.2

clayford/dvdata documentation built on June 11, 2025, 8:43 a.m.