Description Usage Format Source References See Also
An experiment to reduce the variability of the thickness of an "epitaxial layer" deposited onto silicon wafers during the manufacture of integrated circuit devices. Wafer 1 is is the orthogonal array presented in Chapter 15, Table 15.25.
1 |
A data frame of 16 rows and 17 variables. (See example 15.6.1 for explanation of variables.)
http://www.wright.edu/~dan.voss/bookdata/data.html
Dean, A. and Voss, D. (1999). Design and Analysis of Experiments. New York, Springer.
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