wafer.2: Wafer 2

In clayford/dvdata: Data Files for Design and Analysis of Experiments (Dean & Voss)

Description

An experiment to reduce the variability of the thickness of an "epitaxial layer" deposited onto silicon wafers during the manufacture of integrated circuit devices. Wafer 2 is the treatment combinations and response variables presented Chapter 15, Table 15.26.

Usage

wafer.2

Format

A data frame of 16 rows and 10 variables. (See Table 15.24 for explanation of treatment factors and their levels for the experiment.)

Source

http://www.wright.edu/~dan.voss/bookdata/data.html

References

Dean, A. and Voss, D. (1999). Design and Analysis of Experiments. New York, Springer.

See Also

wafer.1

clayford/dvdata documentation built on May 13, 2019, 7:38 p.m.