ETCHRATE: Data on the Rate of Etching
In mistat: Data Sets, Functions and Examples from the Book: "Modern Industrial Statistics" by Kenett, Zacks and Amberti
ETCHRATE R Documentation
Data on the Rate of Etching
Description
Rate of removal of field oxide in a semiconductor plasma etching process.
Usage
data(ETCHRATE)
Source
Digital Equipment Corporation (1988).
Examples
data(ETCHRATE)
hist(ETCHRATE)
mistat documentation built on March 7, 2023, 6:43 p.m.
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| ETCHRATE | R Documentation |
Data on the Rate of Etching
Description
Rate of removal of field oxide in a semiconductor plasma etching process.
Usage
data(ETCHRATE)
Source
Digital Equipment Corporation (1988).
Examples
data(ETCHRATE) hist(ETCHRATE)
R Package Documentation
Browse R Packages
We want your feedback!
Note that we can't provide technical support on individual packages. You should contact the package authors for that.
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