THICKDIFF: Difference in Thickness

THICKDIFFR Documentation

Difference in Thickness

Description

Difference between the thickness of the grown silicon layer and its target value.

Usage

data(THICKDIFF)

Source

E. Yashchin (1991)

Examples

data(THICKDIFF)

plot(THICKDIFF, type="b")

mistat documentation built on March 7, 2023, 6:43 p.m.